Patent · US Active

Systems and methods for acquiring information about a defect on a specimen

US8045145B1 · kind B1 · utility

20Cited by

9References

31Claims

0Family size

Assignee

KLA-Tencor Technologies Corp. · US

Inventors

Dave Bakker · Cupertino, US
Gabor Toth · San Jose, US
Varoujan Chakarian · Fremont, US

Key dates

Filing date	Jun 6, 2007
Grant date	Oct 25, 2011
Priority date	—
Expiry date	Mar 17, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/95607
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and methods for acquiring information about a defect on a specimen are provided. One system includes an optical subsystem configured to acquire topography information about the defect. The system also includes an electron beam subsystem configured to acquire additional information about the defect. One method includes acquiring first data for the defect using an optical technique and second data for the defect using an electron beam technique. The first and second data is acquired while the specimen is disposed in a single vacuum chamber. The method also includes determining topography information about the defect from the first data. In addition, the method includes determining additional information about the defect from the second data.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.