Superior fill conditions in a replacement gate approach by corner rounding prior to completely removing a placeholder material

US8048792B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Sven Beyer · Dresden, DE
• Klaus Hempel · Dresden, DE
• Andreas Ott · Erfurt, DE
• Stephan Kruegel · Sankt Goar, DE

Key dates

• Filing date: Sep 29, 2010
• Grant date: Nov 1, 2011
• Expiry date: Sep 29, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/691

Abstract

In a replacement gate approach, a superior cross-sectional shape of the gate opening may be achieved by performing a material erosion process in an intermediate state of removing the placeholder material. Consequently, the remaining portion of the placeholder material may efficiently protect the underlying sensitive materials, such as a high-k dielectric material, when performing the corner rounding process sequence.