Damping arrangement, active damping system, lithographic apparatus, and projection assembly
US8059259B2 · kind B2 · utility
5Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 11, 2008 |
| Grant date | Nov 15, 2011 |
| Priority date | — |
| Expiry date | Feb 8, 2030 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An active damping system assembly is configured to dampen a vibration of at least part of a structure. The assembly includes a plurality of active dampers each including a sensor configured to measure a position quantity of an interface mass mounted on the structure; and an actuator configured to exert a force on the interface mass in dependency of a signal provided by the sensor, wherein each of the plurality of active damping systems is connected to the interface mass. The structure may be a projection system of a lithographic apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.