Inventor · Veldhoven, NL

Joost De Pee

9Patents
4h-index
17Co-inventors
46Inventor score

Filing activity: Dec 13, 2004 → May 22, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US8164737B2 Lithographic apparatus having an active damping subassembly Physics 8 Active
US8553199B2 Lithographic apparatus and device manufacturing method Physics 5 Active
US7538273B2 Cable connection to decrease the passing on of vibrations from a first object to a second object Physics 5 Active
US8059259B2 Damping arrangement, active damping system, lithographic apparatus, and projection assembly Mechanical Engineering; Lighting; Heating 5 Active
US8243258B2 Lithographic apparatus having acoustic resonator Physics 4 Active
US9378722B2 Lithographic apparatus with actuator to compensate acoustic vibration Physics 4 Active
US8245824B2 Combination of structure and an active damping system, and a lithographic apparatus Mechanical Engineering; Lighting; Heating 2 Active
US7170582B2 Support device and lightographic apparatus Physics 1 Expired
US8743344B2 Cable connection, control system, and method to decrease the passing on of vibrations from a first object to a second object Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.