Patent · US Active

Isotopically-enriched boron-containing compounds, and methods of making and using same

US8062965B2 · kind B2 · utility

18Cited by
32References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 15, 2011
Grant dateNov 22, 2011
Priority date
Expiry dateMar 15, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P20/133
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

An isotopically-enriched, boron-containing compound comprising two or more boron atoms and at least one fluorine atom, wherein at least one of the boron atoms contains a desired isotope of boron in a concentration or ratio greater than a natural abundance concentration or ratio thereof. The compound may have a chemical formula of B2F4. Synthesis methods for such compounds, and ion implantation methods using such compounds, are described, as well as storage and dispensing vessels in which the isotopically-enriched, boron-containing compound is advantageously contained for subsequent dispensing use.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.