Dual-mode robot systems and methods for electronic device manufacturing
US8078304B2 · kind B2 · utility
3Cited by
11References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2008 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Mar 17, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.