Controller gain scheduling for mass flow controllers
US8079383B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 7, 2006 |
| Grant date | Dec 20, 2011 |
| Priority date | — |
| Expiry date | Apr 19, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller having a feedback controller gain, comprises: a sensor configured so as to sense the flow of fluid through controller; a valve arranged so as to adjust the flow of fluid through the controller; and a processor configured so as to control the valve as a function of the flow of fluid sensed by the sensor. The sensor and valve are arranged within a feedback system, and the processor updates the feedback controller gain in real time based on the ratio of at least one calibration gas parameter to at least one operating gas parameter, such that the closed loop transfer function of the feedback system remains substantially constant regardless of operating conditions so as to have a consistent control performance at different operation conditions from the calibration condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.