Temperature extraction from a pressure sensor
US8082796B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 28, 2009 |
| Grant date | Dec 27, 2011 |
| Priority date | — |
| Expiry date | Jan 28, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage is linearly dependent on the temperature but shows negligible sensitivity to mechanical stress. This allows the pressure sensor's temperature to be determined in an environment of changing pressure. Once the temperature is known, the pressure sensor's pressure readings can be adjusted. The threshold voltage can be extracted by measuring the turn-on transistor characteristic of the device and using device models. Alternately, the threshold voltage can be extracted using threshold voltage extraction circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.