Patent · US Active

Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber

US8083859B2 · kind B2 · utility

0Cited by

1References

25Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Stefan Bangert · Lauentheil, DE
Jose Manuel DIEGUEZ-CAMPO · Hanau, DE
Michael Koenig · Kollow, DE
Nety M. Krishna · Sunnyvale, US
Byung Sung Kwak · Portland, US

Key dates

Filing date	May 30, 2008
Grant date	Dec 27, 2011
Priority date	—
Expiry date	Jan 25, 2029

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/564
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2 or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.