Anchoring structure and intermeshing structure

US8084865B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Franz Hirler · Isen, DE
• Walter Rieger · Arnoldstein, AT
• Uwe Schmalzbauer · Neubiberg, DE
• Rudolf Zelsacher · Klagenfurt, AT
• Markus Zundel · Egmating, DE

Key dates

• Filing date: Apr 30, 2008
• Grant date: Dec 27, 2011
• Expiry date: Jun 22, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/519
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An anchoring structure for a metal structure of a semiconductor device includes an anchoring recess structure having at least one overhanging side wall, the metal structure being at least partly arranged within the anchoring recess structure.