Roll-to-roll evaporation system and method to manufacture group IBIIAVIA photovoltaics
US8088224B2 · kind B2 · utility
3Cited by
2References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2010 |
| Grant date | Jan 3, 2012 |
| Priority date | — |
| Expiry date | Apr 28, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present inventions provide method and apparatus that employ constituents vaporized from one or more constituent supply source or sources to form one or more films of a precursor layer formed on a surface of a continuous flexible workpiece. Of particular significance is the implementation of vapor deposition systems that operate upon a horizontally disposed portion of a continuous flexible workpiece and a vertically disposed portion of a continuous flexible workpiece, preferably in conjunction with a short free-span zone of the portion of a continuous flexible workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.