Patent · US Active

Bottom antireflective coating compositions

US8088548B2 · kind B2 · utility

54Cited by
75References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 23, 2007
Grant dateJan 3, 2012
Priority date—
Expiry dateAug 19, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/095
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Developable bottom antireflective coating compositions are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.