Patent · US Active

System and method of measuring probe float

US8089292B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

Rudolph Technologies, Inc. · US

Inventors

John T. Strom · North Bend, US
Raymond Kraft · Seattle, US

Key dates

Filing date	Dec 15, 2009
Grant date	Jan 3, 2012
Priority date	—
Expiry date	Dec 15, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07342
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an examplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.