Environmental cell for a particle-optical apparatus
US8093558B2 · kind B2 · utility
6Cited by
19References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2009 |
| Grant date | Jan 10, 2012 |
| Priority date | — |
| Expiry date | Feb 10, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.