Patent · US Active

MIM capacitor and associated production method

US8093637B2 · kind B2 · utility

7Cited by

3References

23Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Manfred Engelhardt · Feldkirchen-Westerham, DE
Andreas Stich · Kleinmachnow, DE
Guenther Schindler · Hersbruck, DE
Michael Schrenk · Dießen am Ammersee, DE

Key dates

Filing date	Sep 29, 2006
Grant date	Jan 10, 2012
Priority date	—
Expiry date	Sep 29, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH10D1/696
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An MIM capacitor includes a first capacitor electrode, which is formed in the surface of a first intermediate dielectric, a second intermediate dielectric, which is formed on the first intermediate dielectric and has an opening that exposes the first capacitor electrode, and a first electrically conducting diffusion barrier layer, which is formed on the surface of the exposed first capacitor electrode. On the diffusion barrier layer and on the side walls of the opening there is also formed a capacitor dielectric and a second capacitor electrode on top.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.