Patent · US Active

Thermocouple

US8100583B2 · kind B2 · utility

456Cited by

81References

15Claims

0Family size

Assignee

ASM America, Inc. · US

Inventors

Rand Conner · Chandler, US
Ravinder Aggarwal · Gilbert, US

Key dates

Filing date	May 6, 2009
Grant date	Jan 24, 2012
Priority date	—
Expiry date	Jun 3, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01K7/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A thermocouple having at least one inner alignment feature or at least one outer alignment feature, or a combination thereof for positively positioning and aligning at least one thermocouple junction within a bore formed in a susceptor ring of a semiconductor substrate processing reactor. The outer alignment feature is configured to positively align the junction(s) longitudinally within the bore. The inner alignment feature configured to positively position the junction(s) rotationally within the sheath of the thermocouple relative to the bore.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.