Ravinder Aggarwal
45Patents
17h-index
48Co-inventors
81Inventor score
Filing activity: May 22, 1989 → Jul 30, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4987856A | High throughput multi station processor for multiple single wafers | Electricity | 633 | Expired |
| USD600223S1 | Susceptor ring | General | 466 | Expired |
| US8100583B2 | Thermocouple | Physics | 456 | Active |
| US8616765B2 | Thermocouple | Physics | 452 | Active |
| US9267850B2 | Thermocouple assembly with guarded thermocouple junction | Physics | 448 | Active |
| US9297705B2 | Smart temperature measuring device | Physics | 448 | Active |
| US6696367B1 | System for the improved handling of wafers within a process tool | Emerging Cross-Sectional Technologies | 408 | Expired |
| US7725012B2 | Movable radiant heat sources | Electricity | 371 | Active |
| US8382370B2 | Thermocouple assembly with guarded thermocouple junction | Physics | 328 | Active |
| US6776849B2 | Wafer holder with peripheral lift ring | Electricity | 300 | Expired |
| US6042324A | Multi-stage single-drive FOUP door system | Emerging Cross-Sectional Technologies | 57 | Expired |
| US6899145B2 | Front opening unified pod | Electricity | 44 | Expired |
| US5091217A | Method for processing wafers in a multi station common chamber reactor | Electricity | 31 | Expired |
| US7648579B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 30 | Expired |
| US6242718A | Wafer holder | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6609869B2 | Transfer chamber with integral loadlock and staging station | Electricity | 23 | Expired |
| US6158951A | Wafer carrier and method for handling of wafers with minimal contact | Emerging Cross-Sectional Technologies | 21 | Expired |
| US8486191B2 | Substrate reactor with adjustable injectors for mixing gases within reaction chamber | Chemistry; Metallurgy | 17 | Active |
| US6592318B2 | Docking cart with integrated load port | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6465761B2 | Heat lamps for zone heating | Chemistry; Metallurgy | 14 | Expired |
| US6318957A | Method for handling of wafers with minimal contact | Emerging Cross-Sectional Technologies | 13 | Expired |
| US8088225B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 13 | Active |
| US7449071B2 | Wafer holder with peripheral lift ring | Electricity | 13 | Expired |
| US8394229B2 | Susceptor ring | Chemistry; Metallurgy | 12 | Active |
| US8047706B2 | Calibration of temperature control system for semiconductor processing chamber | Physics | 12 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.