Simplified micro-bridging and roughness analysis
US8108805B2 · kind B2 · utility
30Cited by
41References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 26, 2010 |
| Grant date | Jan 31, 2012 |
| Priority date | — |
| Expiry date | May 6, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides apparatus and methods for processing substrates using pooled statistically based variance data. The statistically based variance data can include Pooled Polymer De-protection Variance (PPDV) data that can be used to determine micro-bridging defect data, LER defect data, and LWR defect data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.