Patent · US Active

Resonance frequency tunable MEMS device

US8115573B2 · kind B2 · utility

6Cited by

9References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Florian Schoen · Altdorf, DE
Mohsin Nawaz · Itasca, US
Mihail Sararoiu · Bucharest, RO

Key dates

Filing date	May 29, 2009
Grant date	Feb 14, 2012
Priority date	—
Expiry date	May 21, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH03J2200/19
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.