Method and apparatus for MEMS oscillator
US8119432B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Nov 12, 2010 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Nov 19, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02519
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.