Patent · US Active

System method and apparatus for selecting and controlling light source bandwidth

US8144739B2 · kind B2 · utility

16Cited by

8References

14Claims

0Family size

Assignee

Cymer, LLC · US

Inventors

Efrain Figueroa · San Diego, US
William N. Partlo · Poway, US
John M. Algots · San Diego, US

Key dates

Filing date	Oct 23, 2009
Grant date	Mar 27, 2012
Priority date	—
Expiry date	Oct 8, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/1067
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.