Carbon nanotube spring contact structures with mechanical and electrical components

US8149007B2 · kind B2 · utility

Assignee

• FormFactor, Inc. · US

Inventors

• Jimmy Chen · Pleasanton, US
• Treliant Fang · Dublin, US
• Michael Harburn · San Ramon, US
• Igor Y. Khandros · Orinda, US
• Rodney Ivan Martens · Mechanicsburg, US
• Gaetan L. Mathieu · Varennes, CA
• Alexander H. Slocum · Bow, US
• Onnik Yaglioglu · Thousand Oaks, US

Key dates

• Filing date: Apr 10, 2009
• Grant date: Apr 3, 2012
• Expiry date: Jan 2, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49204
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A composite spring contact structure includes a structural component and a conduction component distinct from each other and having differing mechanical and electrical characteristics. The structural component can include a group of carbon nanotubes. A mechanical characteristic of the composite spring contact structure can be dominated by a mechanical characteristic of the structural component, and an electrical characteristic of the composite spring contact structure can be dominated by an electrical characteristic of the conduction component. Composite spring contact structures can be used in probe cards and other electronic devices. Various ways of making contact structures are also disclosed.