Microresonator
US8159109B2 · kind B2 · utility
1Cited by
8References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 4, 2010 |
| Grant date | Apr 17, 2012 |
| Priority date | — |
| Expiry date | Aug 4, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.