In-chamber electron detector
US8164059B2 · kind B2 · utility
3Cited by
23References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2008 |
| Grant date | Apr 24, 2012 |
| Priority date | — |
| Expiry date | Sep 14, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A secondary particle detector 302 for a charged particle beam system 300 includes a scintillator 304 and a transducer 312, such as a photomultiplier tube, positioned within a vacuum chamber 107. Unlike prior art Everhart-Thornley detectors, the photomultiplier is positioned within the vacuum chamber, which improves detection by eliminating optical couplings and provides flexibility in positioning the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.