Charged particle separation apparatus and charged particle bombardment apparatus
US8168946B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Jun 16, 2010 |
| Grant date | May 1, 2012 |
| Priority date | — |
| Expiry date | Nov 10, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/282
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle separation apparatus that separates ionized gas clusters is disclosed. The charged particle separation apparatus includes an electric field applying part including two electrodes across which electric voltage is applied in order to generate electric field between the two electrodes thereby deflecting a trajectory of the ionized gas cluster, the electrodes including one of an opening and a void; and a plate opening that allows the ionized gas cluster whose trajectory is deflected by the electric field applying part to go therethrough.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.