Masaki Narushima
16Patents
9h-index
25Co-inventors
72Inventor score
Filing activity: Oct 21, 1988 → Sep 14, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6951587B1 | Ceramic heater system and substrate processing apparatus having the same installed therein | Chemistry; Metallurgy | 536 | Expired |
| US5474410A | Multi-chamber system provided with carrier units | Emerging Cross-Sectional Technologies | 417 | Expired |
| US5332442A | Surface processing apparatus | Electricity | 94 | Expired |
| US7090741B2 | Semiconductor processing system | Electricity | 39 | Expired |
| US7198448B2 | Vacuum process system | Emerging Cross-Sectional Technologies | 26 | Expired |
| US4955590A | Plate-like member receiving apparatus | Performing Operations; Transporting | 21 | Expired |
| US5065495A | Method for holding a plate-like member | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7025554B2 | Vacuum process system | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6802934B2 | Processing apparatus | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6702865B1 | Alignment processing mechanism and semiconductor processing device using it | Emerging Cross-Sectional Technologies | 8 | Expired |
| US8940638B2 | Substrate wiring method and semiconductor manufacturing device | Electricity | 4 | Active |
| US4941800A | Transfer apparatus for plate-like member | Electricity | 3 | Expired |
| US7393172B1 | Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device | Emerging Cross-Sectional Technologies | 2 | Expired |
| US9209010B2 | Substrate cleaning method and substrate cleaning device | Electricity | 2 | Active |
| US8635655B2 | Input switching apparatus and input switching method of audio/video signal, and audio/video system | Electricity | 0 | Active |
| US8168946B2 | Charged particle separation apparatus and charged particle bombardment apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.