Method and system for automatic generation of throughput models for semiconductor tools

US8170704B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Kilian Schmidt · Dresden, DE
• Roy Boerner · Dresden, DE
• Jan Lange · Neustadt, DE

Key dates

• Filing date: Mar 9, 2009
• Grant date: May 1, 2012
• Expiry date: Aug 2, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B17/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messages with high statistical relevance.