Polishing system having a track
US8172643B2 · kind B2 · utility
10Cited by
11References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2009 |
| Grant date | May 8, 2012 |
| Priority date | — |
| Expiry date | Sep 18, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B45/003
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Embodiments described herein relate to a track system in a polishing system. One embodiment described herein provides a track system configured to transfer polishing heads in a polishing system. The track system comprises a supporting frame, a track coupled to the supporting frame and defining a path along which the polishing heads are configured to move, and one or more carriages configured to carry at least one polishing head along the path defined by the track, wherein the one or more carriages are coupled to the track and independently movable along the track.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.