Patent · US Active

Micromechanical component having multiple caverns, and manufacturing method

US8174082B2 · kind B2 · utility

1Cited by

2References

21Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Frank Fischer · Mesa, US
Eckhard Graf · Gomaringen, DE
Heiko Stahl · Reutlingen, DE
Hartmut Kueppers · Reutlingen, DE
Roland Scheuerer · Reutlingen, DE

Key dates

Filing date	Apr 28, 2005
Grant date	May 8, 2012
Priority date	—
Expiry date	Jul 3, 2026

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0145
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical component having at least two caverns is provided, the caverns being delimited by the micromechanical component and a cap, and the caverns having different internal atmospheric pressures. The micromechanical component and cap are hermetically joined to one another at a first specifiable atmospheric pressure, then an access to at least one cavern is produced, and subsequently the access is hermetically closed off at a second specifiable atmospheric pressure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.