Vertical heat treatment apparatus and method for operating the same
US8177550B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2005 |
| Grant date | May 15, 2012 |
| Priority date | — |
| Expiry date | Mar 10, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts. Either one of the loading and unloading parts 3, 4 is utilized as a third storage part 30 that stores a carrying container 2. The carrying container storage capacity may be increased and the throug…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.