Inventor · Tokyo, JP

Hirofumi Kaneko

21Patents
8h-index
30Co-inventors
75Inventor score

Filing activity: Feb 12, 1998 → Oct 25, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9759489B2 Heat treatment apparatus Electricity 446 Active
USD570309S1 Wafer boat General 24 Expired
USD725053S1 Outer tube for process tube for manufacturing semiconductor wafers General 19 Active
US6168154A Sheet handling device for continually fed sheets which are aligned and moved from first to second storage locations Performing Operations; Transporting 18 Expired
USD619630S1 Process tube for manufacturing semiconductor wafers General 16 Expired
USD720309S1 Inner tube for process tube for manufacturing semiconductor wafers General 16 Active
US5957652A Sheet handling apparatus Performing Operations; Transporting 9 Expired
USD724551S1 Inner tube for process tube for manufacturing semiconductor wafers General 9 Active
US7120773B2 Apparatus and method for memory management Physics 8 Expired
USD590359S1 Process tube for manufacturing semiconductor wafers or the like General 7 Expired
USD720308S1 Inner tube for process tube for manufacturing semiconductor wafers General 6 Active
US8177550B2 Vertical heat treatment apparatus and method for operating the same Emerging Cross-Sectional Technologies 5 Active
US7798811B2 Vertical type heat processing apparatus and vertical type heating method Mechanical Engineering; Lighting; Heating 4 Active
US11515119B2 Plasma processing device Electricity 2 Active
US10636627B2 Substrate processing apparatus Chemistry; Metallurgy 1 Active
US9845991B2 Heat treatment apparatus Electricity 1 Active
US11302542B2 Processing apparatus Mechanical Engineering; Lighting; Heating 0 Active
US8216378B2 Reaction tube and heat processing apparatus for a semiconductor process Electricity 0 Active
US12353641B2 Display control system, display control method, and program Physics 0 Active
US10465986B2 Heat treatment apparatus Electricity 0 Active
US10281214B2 Heat treatment apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.