Patent · US Active

Wafer holder for supporting a semiconductor wafer during a thermal treatment process

US8186661B2 · kind B2 · utility

10Cited by

8References

10Claims

0Family size

Assignee

MEMC Electronic Materials, Inc. · US

Inventors

John A. Pitney · Saint Peters, US
Thomas A. Torack · Oakland, US

Key dates

Filing date	Sep 16, 2008
Grant date	May 29, 2012
Priority date	—
Expiry date	Jan 4, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S269/903
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A wafer holder for holding a semiconductor wafer during a thermal wafer treatment process. The wafer holder includes at least three wafer supports. Each wafer support includes an upright shaft and a plurality of flexible fibers supported by the shaft in positions such that at least some of the fibers engage the semiconductor wafer when the wafer rests on the wafer supports.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.