Patent · US Active

Integrated circuit device and method

US8187964B2 · kind B2 · utility

1Cited by
38References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 19, 2009
Grant dateMay 29, 2012
Priority date
Expiry dateFeb 11, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated circuit device includes a semiconductor chip with a metallization layer on the chip. A gas-phase deposited insulation layer is disposed on the metallization layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.