Integrated circuit device and method
US8187964B2 · kind B2 · utility
1Cited by
38References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2009 |
| Grant date | May 29, 2012 |
| Priority date | — |
| Expiry date | Feb 11, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit device includes a semiconductor chip with a metallization layer on the chip. A gas-phase deposited insulation layer is disposed on the metallization layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.