Hybrid ion source/multimode ion source
US8193513B2 · kind B2 · utility
6Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2008 |
| Grant date | Jun 5, 2012 |
| Priority date | — |
| Expiry date | Oct 24, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30472
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A hybrid ion source, comprising a source body configured to create plasma therein, from a first material, wherein the first material comprises one of monatomic gases, small molecule gases, large molecule gases, reactive gases, and solids, a low power plasma generation component operably associated with the source body, a high power plasma generation component operably associated with the source body and an extraction aperture configured to extract ions of the ion plasma from the source body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.