Image forming method and charged particle beam apparatus
US8203504B2 · kind B2 · utility
0Cited by
16References
12Claims
0Family size
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Key dates
| Filing date | Oct 19, 2010 |
| Grant date | Jun 19, 2012 |
| Priority date | — |
| Expiry date | Oct 19, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.