Variable rate scanning in an electron microscope
US8207499B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2008 |
| Grant date | Jun 26, 2012 |
| Priority date | — |
| Expiry date | Jun 11, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2823
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.