Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method
US8208128B2 · kind B2 · utility
10Cited by
17References
66Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 6, 2009 |
| Grant date | Jun 26, 2012 |
| Priority date | — |
| Expiry date | Dec 5, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D2205/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower surface of the stage. A Y encoder that measures Y positional information of the stage is configured including the moving gratings and the fixed gratings. Similarly, an X encoder that measures X positional information of the stage is configured including the moving gratings and the fixed grating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.