Patent · US Active

Micromechanical component and method for the manufacture thereof

US8217476B2 · kind B2 · utility

2Cited by

0References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Karl-Heinz Kraft · Stuttgart, DE
Simon Armbruster · Wannweil, DE
Arnim Hoechst · Lörrach, DE

Key dates

Filing date	Jun 17, 2010
Grant date	Jul 10, 2012
Priority date	—
Expiry date	Jan 19, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0191
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for manufacturing a micromechanical component and the micromechanical component produced thereby. This component is preferably a diaphragm or a diaphragm layer which is independently produced for the purpose of subsequent assembly with other components.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.