Patent · US Active

Light-assisted testing of an optoelectronic module

US8222911B2 · kind B2 · utility

0Cited by

6References

24Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Bernhard Mueller · Finsing, DE
Ralf Schmid · Karlsruhe, DE
Matthias Brunner · Tauberbischofsheim, DE

Key dates

Filing date	Apr 4, 2007
Grant date	Jul 17, 2012
Priority date	—
Expiry date	Jun 30, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG02F1/136254
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.