Coating apparatus and method
US8225737B2 · kind B2 · utility
4Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2009 |
| Grant date | Jul 24, 2012 |
| Priority date | — |
| Expiry date | Oct 4, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A coating apparatus includes a driving unit configured to rotate a substrate holding member about a vertical axis to spread a coating liquid supplied on a front side central portion of a substrate toward a front side peripheral portion of the substrate by a centrifugal force. The apparatus is provided with a wobble damping mechanism including a gas delivery port and a suction port both disposed to face a back side of the substrate and configured to damp a wobble of the substrate being rotated by delivering a gas from the delivery port and sucking the gas into the suction port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.