Inventor · Kumamoto, JP

Nobuhiro Ogata

37Patents
5h-index
56Co-inventors
68Inventor score

Filing activity: Oct 2, 2006 → Jun 28, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8256370B2 Coating apparatus and method Electricity 15 Active
US9073103B2 Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method Electricity 7 Active
US8808798B2 Coating method Electricity 6 Active
US8869811B2 Liquid processing apparatus and liquid processing method Electricity 5 Active
US9048269B2 Substrate liquid treatment apparatus with lift pin plate Electricity 5 Active
US9355871B2 Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup Physics 5 Active
US7976896B2 Method of processing a substrate and apparatus processing the same Electricity 5 Active
US8845815B2 Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein Emerging Cross-Sectional Technologies 4 Active
US8539906B2 Substrate liquid processing apparatus Electricity 4 Active
US8225737B2 Coating apparatus and method Emerging Cross-Sectional Technologies 4 Active
US9387520B2 Liquid processing apparatus and cleaning method Electricity 3 Active
US8186298B2 Coating film forming apparatus, use of coating film forming apparatus, and recording medium Electricity 2 Active
US11574827B2 Substrate processing apparatus and substrate processing method Electricity 2 Active
US9305767B2 Liquid processing apparatus, liquid processing method and storage medium Electricity 2 Active
US8840752B2 Flow passage switching apparatus, processing apparatus, flow passage switching method, processing method and storage medium Emerging Cross-Sectional Technologies 2 Active
US9721813B2 Liquid processing apparatus with cleaning jig Electricity 1 Active
US11712710B2 Substrate processing apparatus and substrate processing method Electricity 1 Active
US8881751B2 Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus Emerging Cross-Sectional Technologies 1 Active
US8551563B2 Coating method Emerging Cross-Sectional Technologies 1 Active
US7984690B2 Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium Emerging Cross-Sectional Technologies 0 Active
US9484230B2 Substrate liquid processing apparatus Electricity 0 Active
US11024518B2 Substrate processing apparatus, substrate processing method and recording medium Electricity 0 Active
US12424459B2 Substrate processing apparatus and substrate processing method Electricity 0 Active
US9022045B2 Substrate liquid cleaning apparatus with controlled liquid port ejection angle Electricity 0 Active
US10475671B2 Substrate processing apparatus and method of cleaning substrate processing apparatus Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.