Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias
US8236133B2 · kind B2 · utility
11Cited by
1References
9Claims
0Family size
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Key dates
| Filing date | Jun 20, 2008 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Jun 8, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32449
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A gas distribution assembly for the ceiling of a plasma reactor includes a center fed hub and an equal path length distribution gas manifold underlying the center fed hub.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.