Inventor · Calabasas, CA, US

Dan Katz

38Patents
13h-index
41Co-inventors
81Inventor score

Filing activity: Oct 19, 1992 → Feb 27, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5429070A High density plasma deposition and etching apparatus Electricity 196 Expired
US5421891A High density plasma deposition and etching apparatus Electricity 99 Expired
US6189484A Plasma reactor having a helicon wave high density plasma source Electricity 77 Expired
US6894245B2 Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Electricity 70 Expired
US6586886B1 Gas distribution plate electrode for a plasma reactor Electricity 68 Expired
US6471822B1 Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma Electricity 67 Expired
US7030335B2 Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Electricity 53 Expired
US7132618B2 MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Electricity 36 Expired
US7645357B2 Plasma reactor apparatus with a VHF capacitively coupled plasma source of variable frequency Electricity 30 Active
US7264688B1 Plasma reactor apparatus with independent capacitive and toroidal plasma sources Electricity 27 Expired
US7436645B2 Method and apparatus for controlling temperature of a substrate Electricity 23 Active
US6676760B2 Process chamber having multiple gas distributors and method Chemistry; Metallurgy 20 Expired
US9275887B2 Substrate processing with rapid temperature gradient control Performing Operations; Transporting 17 Active
US8066895B2 Method to control uniformity using tri-zone showerhead Electricity 13 Active
US7674394B2 Plasma process for inductively coupling power through a gas distribution plate while adjusting plasma distribution Electricity 11 Active
US8236133B2 Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias Electricity 11 Active
US6677712B2 Gas distribution plate electrode for a plasma receptor Electricity 11 Expired
US9870721B2 System and method for teaching basic ultrasound skills Human Necessities 10 Active
US7780864B2 Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution Electricity 10 Active
US11062624B2 Embedded motion sensing technology for integration within commercial ultrasound probes Human Necessities 9 Active
US10380919B2 System and method for extended spectrum ultrasound training using animate and inanimate training objects Physics 9 Active
US7832354B2 Cathode liner with wafer edge gas injection in a plasma reactor chamber Electricity 9 Active
US11315439B2 System and method for extended spectrum ultrasound training using animate and inanimate training objects Physics 8 Active
US10380920B2 System and method for augmented ultrasound simulation using flexible touch sensitive surfaces Physics 8 Active
US11120709B2 System and method for teaching basic ultrasound skills Human Necessities 8 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.