Packaging an integrated circuit die with backside metallization
US8236609B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 1, 2008 |
| Grant date | Aug 7, 2012 |
| Priority date | — |
| Expiry date | Jun 8, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method (32) of packaging integrated circuit (IC) dies (48) includes applying (36) a laminating material (44) to a wafer (40), and separating (46) the wafer (40) into multiple IC dies (48) such that the laminating material (44) is applied to back surfaces (52) of the IC dies (48). Each of the IC dies (48) is positioned (62) with an active surface (50) facing a support substrate (56). An encapsulant layer (72) is formed (64) overlying the laminating material (44) and the back surfaces (52) of the IC dies (48) from a molding compound (66). The molding compound (66) and the laminating material (44) are removed from the back surfaces (52) of the IC dies (48) to form (76) openings (78) exposing the back surfaces (52). Conductive material (84, 88) is placed in the openings (78) and functions as a heat sink and/or a ground for the IC dies (48).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.