Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
US8241940B2 · kind B2 · utility
10Cited by
80References
13Claims
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Key dates
| Filing date | Feb 12, 2011 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Feb 12, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This disclosure presents manufacturing methods and apparatus designs for making TFSSs from both sides of a re-usable semiconductor template, thus effectively increasing the substrate manufacturing throughput and reducing the substrate manufacturing cost. This approach also reduces the amortized starting template cost per manufactured substrate (TFSS) by about a factor of 2 for a given number of template reuse cycles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.