Lithographic apparatus having acoustic resonator
US8243258B2 · kind B2 · utility
4Cited by
5References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2008 |
| Grant date | Aug 14, 2012 |
| Priority date | — |
| Expiry date | Mar 26, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic apparatus may be provided with an acoustic resonator to dampen an acoustic vibration in the lithographic apparatus. The acoustic resonator may include a Helmholtz resonator. The helmholz resonator may be provided with an active element to provide active damping and/or altering a spring characteristic of the mass spring assembly formed by the resonator. The resonator may be provided at a slit in a shield between the patterning device stage and the projection system to suppress transfer of acoustical vibrations, caused by e.g. a movement of the patterning device stage, to the projection system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.