Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methods

US8243273B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Vladimir Levinski · Milpitas, US
• Michael Adel · Zichron Ya'akov, IL
• Mark Ghinovker · Migdal HaEmek, IL
• Alexander Svizher · Haifa, IL

Key dates

• Filing date: Jun 4, 2009
• Grant date: Aug 14, 2012
• Expiry date: Aug 18, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A semiconductor wafer may include a dummy field configured to enable overlay measurements. The enhanced dummy field may include a plurality of encoding blocs that enable OVL measurements to be made throughout the enhanced dummy field.