Michael Adel
83Patents
24h-index
98Co-inventors
91Inventor score
Filing activity: Jan 28, 1993 → Jul 6, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6556853B1 | Spectral bio-imaging of the eye | Physics | 355 | Expired |
| US7242477B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 83 | Expired |
| US5856871A | Film thickness mapping using interferometric spectral imaging | Physics | 82 | Expired |
| US6198532A | Spectral bio-imaging of the eye | Physics | 78 | Expired |
| US6142629A | Spectral imaging using illumination of preselected spectral content | Physics | 78 | Expired |
| US6928628B2 | Use of overlay diagnostics for enhanced automatic process control | Physics | 75 | Expired |
| US6921916B2 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 70 | Expired |
| US6985618B2 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 63 | Expired |
| US6419361B2 | Spectral bio-imaging of the eye | Physics | 63 | Expired |
| US7440105B2 | Continuously varying offset mark and methods of determining overlay | Physics | 57 | Expired |
| US7068833B1 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 49 | Expired |
| US7317531B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 49 | Expired |
| US7608468B1 | Apparatus and methods for determining overlay and uses of same | Emerging Cross-Sectional Technologies | 41 | Expired |
| US7804994B2 | Overlay metrology and control method | Physics | 37 | Active |
| US7346878B1 | Apparatus and methods for providing in-chip microtargets for metrology or inspection | Emerging Cross-Sectional Technologies | 35 | Expired |
| US7280212B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 34 | Expired |
| US7571422B2 | Method for generating a design rule map having spatially varying overlay budget | Physics | 34 | Active |
| US7298481B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 34 | Expired |
| US7289213B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 33 | Expired |
| US8330281B2 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 30 | Active |
| US7528941B2 | Order selected overlay metrology | Physics | 29 | Active |
| US7181057B2 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 28 | Expired |
| US7557921B1 | Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools | Physics | 27 | Active |
| US6082892A | Temperature measuring method and apparatus | Physics | 26 | Expired |
| US5823681A | Multipoint temperature monitoring apparatus for semiconductor wafers during processing | Physics | 24 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.