Combination of structure and an active damping system, and a lithographic apparatus
US8245824B2 · kind B2 · utility
2Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2008 |
| Grant date | Aug 21, 2012 |
| Priority date | — |
| Expiry date | Jan 5, 2031 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/002
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An active damping system to dampen a vibration of at least a part of the structure, including a device to determine a position quantity of the structure and an actuator to exert a force on the structure in dependency of the determined position quantity, wherein the device is a calculation device configured to calculate the position quantity of the structure on the basis of actuator signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.