Patent · US Active

Apparatus and method for investigating and/or modifying a sample

US8247782B2 · kind B2 · utility

5Cited by

24References

20Claims

0Family size

Assignee

Carl Zeiss SMS Ltd. · IL

Inventors

Klaus Edinger · Lorsch, DE
Rainer Becker · Pfungstadt, DE
Michael Budach · Hanau, DE
Thorsten Hofmann · Rodgau, DE

Key dates

Filing date	May 27, 2010
Grant date	Aug 21, 2012
Priority date	—
Expiry date	Nov 9, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus and a method for investigating and/or modifying a sample is disclosed. The apparatus comprises a charged particle source, at least one particle optical element forming a charged particle beam of charged particles emitted by said charged particle source. The apparatus further comprises an objective lens which generates a charged particle probe from said charged particle beam. The objective lens defines a particle optical axis. A first electrostatic deflection element is arranged—in a direction of propagation of charged particles emitted by said charged particle source—downstream of the objective lens. The electrostatic deflection element deflecting the charged particle beam in a direction perpendicular to said charged particle optical axis and has a deflection bandwidth of at least 10 MHz.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.